Accession Number:

ADD005114

Title:

Direct Measurement of the Electron Beam of a Scanning Electron Microscope.

Descriptive Note:

Patent,

Corporate Author:

DEPARTMENT OF THE NAVY WASHINGTON D C

Personal Author(s):

Report Date:

1978-04-25

Pagination or Media Count:

9.0

Abstract:

Apparatus for measuring the electron beam diameter of a scanning electron microscope includes a transducer which supports a heated wire acting as a knife edge an electron collector and a display. The electron beam is scanned across the knife edge to obtain a change in current density which is received by the electron collector and shown as a trace on the display. This trace is a relative measurement of electron beam diameter. The electron beam is scanned a second time with the transducer moving the heated wire abruptly during the second scan to cause a shift in the current density trace on the display. The amount of shift between the traces of the initial and second scans is a reference distance against which the relative measurement of electron beam diameter may be measured. Author

Subject Categories:

  • Test Facilities, Equipment and Methods

Distribution Statement:

APPROVED FOR PUBLIC RELEASE