Direct Measurement of the Electron Beam of a Scanning Electron Microscope.
DEPARTMENT OF THE NAVY WASHINGTON D C
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Apparatus for measuring the electron beam diameter of a scanning electron microscope includes a transducer which supports a heated wire acting as a knife edge an electron collector and a display. The electron beam is scanned across the knife edge to obtain a change in current density which is received by the electron collector and shown as a trace on the display. This trace is a relative measurement of electron beam diameter. The electron beam is scanned a second time with the transducer moving the heated wire abruptly during the second scan to cause a shift in the current density trace on the display. The amount of shift between the traces of the initial and second scans is a reference distance against which the relative measurement of electron beam diameter may be measured. Author
- Test Facilities, Equipment and Methods