Flash Melting Method for Producing New Impurity Distributions in Solids.
DEPARTMENT OF THE NAVY WASHINGTON D C
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This invention relates generally to producing impurity concentration profiles in solids and particularly to methods of producing semiconductor devices and optical waveguides. An impurity concentration profile is established in a solid by attaching the solid to heat sink and irradiating it with one or more fast laser pulses. The impurity may initially be located in a surface layer or it may be dispersed throughout the solid.
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems