Method for Fabricating High Efficiency Semi-Planar Electro-optic Modulators.
DEPARTMENT OF THE NAVY WASHINGTON D C
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The invention relates to a method for fabricating high efficiency semi-planar electro-optic modulators. The method and process of the present invention comprises the steps of depositing an electro-optic epitaxial waveguiding layer on a low resistivity single crystal substrate. Then an optical buffer material may be deposited on top of the epitaxial waveguiding material, if desired, though it is not an absolute essential in every case of practicing the present invention. First and second electrodes are then deposited on opposite sides so that one electrode is on the bottom of the substrate material while the other electrode may be on top of the optical buffer material.
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