Accession Number:

ADB220797

Title:

Database Needs for Modeling and Simulation of Plasma Processing.

Descriptive Note:

Corporate Author:

NATIONAL RESEARCH COUNCIL WASHINGTON DC

Personal Author(s):

Report Date:

1996-01-01

Pagination or Media Count:

71.0

Abstract:

Descriptors:

• *PRODUCTION ENGINEERING
• *PLASMA DEVICES
• DATA BASES
• MANUFACTURING
• INTEGRATED CIRCUITS
• SEMICONDUCTOR DEVICES
• ETCHING
• SURFACE CHEMISTRY
• MASKS

Subject Categories:

• Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE