Accession Number:

ADB220797

Title:

Database Needs for Modeling and Simulation of Plasma Processing.

Descriptive Note:

Corporate Author:

NATIONAL RESEARCH COUNCIL WASHINGTON DC

Personal Author(s):

Report Date:

1996-01-01

Pagination or Media Count:

71.0

Abstract:

Subject Categories:

  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE