Investigation of Microcircuit Seal Testing
Final technical rept. Feb 1973-Aug 1974
TEXAS INSTRUMENTS INC DALLAS
Pagination or Media Count:
The purpose of this investigation was to determine the detection ranges of Test Conditions A, B, C, and E of Method 1014, MIL-STD-883. Also to examine the test variables and modifications of the methods for possible expansion of the detection ranges, and to improve the overall test results. This report discusses the various tests conducted and the results of these tests. In addition to the standard test conditions, various exposure pressures and times of both helium and radioisotope tracer gases are examined. Surface absorption, gettering materials, and controlled orifice helium testing are each examined and discussed. Also the gross leak bubble and weight gain test methods are evaluated for sensitivity and effectiveness using various pressures, pressurization times, and fluids for the purpose of optimizing test conditions and defining reject criteria. Based on the data analysis of this testing, recommendations of leak rate limits and parameter conditions are made which will provide the highest degree of reliability in the most cost-effective manner.
- Adhesives, Seals and Binders
- Test Facilities, Equipment and Methods