Accession Number:

ADA626169

Title:

Micro-Electro-Mechanical Systems (MEMS) Fabrication Course Projects Review for FY15

Descriptive Note:

Technical document (Briefing charts)

Corporate Author:

SPACE AND NAVAL WARFARE SYSTEMS CENTER SAN DIEGO CA

Report Date:

2015-09-01

Pagination or Media Count:

54.0

Abstract:

In Fiscal Year FY 2015, the third year of a three-year Naval Innovative Science and Engineering NISE Program Workforce Development project, Space and Naval Warfare Systems Center SSC Pacific held a course on micro-electro-mechanical MEMS and semiconductor device and fabrication techniques to assist its Science and Techno ST scientists and engineers to technologies that increase the capabilities of the U.S. Navy warfighters. The objective of this workforce development project is to further develop and offer a course for SSC Pacific ST professionals to broaden their skills, experience, and understanding of MEMS and lithography-based device fabrication through instruction and hands-on experience. The course was 14 weeks, consisted of 16 hours of lectures at SSC Pacific, and 32 hours at a local semiconductor fabrication facility with an external user program in this case, at the San Diego State University SDSU MEMS lab. The SSC Pacific and SDSU instructors were experienced in semiconductor processing and MEMS design. The students became familiar with the capabilities of semiconductor fabrication, allowing device development using less money compared to outsourcing and more hands-on interaction and process ownership. The course was not for the students to complete their projects in the initial 14 weeks, but to act as a launching pad for new innovations that will assist funded projects and stimulate the creation of new funded projects.

Subject Categories:

  • Electrical and Electronic Equipment
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE