Accession Number:

ADA624958

Title:

Multicharged Ion Promoted Desorption (MIPD) of Reaction Co-Products

Descriptive Note:

Final rept. 11 Feb 2013-10 Sep 2014

Corporate Author:

CLEMSON UNIV SC

Personal Author(s):

Report Date:

2015-02-13

Pagination or Media Count:

15.0

Abstract:

Multicharged ions MCIs produced in a new, electron beam ion trap EBIT based ion source, were investigated as a means of inducing athermal surface reactions for thin film processing. The specific surface systems investigated were highly oriented pyrolytic graphite HOPG, nanodiamond ND and polycarbonate PC. Beams of oxygen Q3 and 5 and argon Q1, 4, and 8 ions were focused at normal incidence onto these target surfaces with fluences in the range of 1012 1013 particles per square centimeter. In-situ measurements of desorption and ex-situ measurements of surface modifications using mass spectrometry, Raman spectroscopy and XPS were made to determine ion-induced effects. The primary ion-induced results were in the HOPG and PC systems, where the ion impacts led to structural changes that could be attributed to bond breaking both HOPG and PC and the formation of new solid phases HOPG to diamond-like conversion. The structural changes observed in PC indicate a charge-dependent enhancement, and, consequently, dose-dependent effects with an onset at fluences three orders of magnitude below those required for singly charged ions surface processing of the same substrate.

Subject Categories:

  • Physical Chemistry
  • Electricity and Magnetism
  • Atomic and Molecular Physics and Spectroscopy
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE