Accession Number:

ADA624643

Title:

Non-Equilibrium Modeling of Inductively Coupled RF Plasmas

Descriptive Note:

Conference paper

Corporate Author:

AIR FORCE RESEARCH LAB EDWARDS AFB CA ROCKET PROPULSION DIV

Report Date:

2015-01-01

Pagination or Media Count:

12.0

Abstract:

This paper discusses the modeling of non-equilibrium effects in inductively coupled plasma facilities. The model relies on the solution of the Navier-Stokes and Maxwell equations in a one-dimensional geometry. Steady-state solutions are obtained by means of an implicit Finite Volume method. Non-equilibrium effects are treated by means of a hybrid State-to-State formulation. The electronic states of atoms are treated as separate species, allowing for non-Boltzmann distributions of their populations. Thermal non-equilibrium between the translation and vibrational of heavy-particles is accounted for by means of a multi-temperature approach. The results show that non-equilibrium plays an important role close to the walls, due to the combined effects of Ohming heating, and chemical composition and temperature gradients.

Subject Categories:

  • Plasma Physics and Magnetohydrodynamics
  • Thermodynamics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE