Microfabricated Cantilevers Based on Sputtered Thin-Film Ni50Ti50 Shape Memory Alloy (SMA)
Final rept. Nov 2014-May 2015
ARMY RESEARCH LAB ADELPHI MD SENSORS AND ELECTRON DEVICES DIRECTORATE
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In this work, we discuss the design and fabrication of a nickel-titanium Ni50Ti50 shape memory alloy SMA cantilever array that was thermally actuated by harnessing the residual stress difference during the martensite-to-austenite phase transformation during heating. The cantilever devices were fabricated on a silicon Si wafer using standard microfabrication techniques and released using a xenon difluoride XeF2 dry-etch technique and may therefore be applicable to microelectromechanical system MEMS switch or actuator applications. We demonstrated partially released devices capable of tearing a 1 3 m rib of Si upon thermal actuation.
- Physical Chemistry
- Properties of Metals and Alloys
- Fabrication Metallurgy