Accession Number:

ADA623476

Title:

Microfabricated Cantilevers Based on Sputtered Thin-Film Ni50Ti50 Shape Memory Alloy (SMA)

Descriptive Note:

Final rept. Nov 2014-May 2015

Corporate Author:

ARMY RESEARCH LAB ADELPHI MD SENSORS AND ELECTRON DEVICES DIRECTORATE

Report Date:

2015-08-01

Pagination or Media Count:

20.0

Abstract:

In this work, we discuss the design and fabrication of a nickel-titanium Ni50Ti50 shape memory alloy SMA cantilever array that was thermally actuated by harnessing the residual stress difference during the martensite-to-austenite phase transformation during heating. The cantilever devices were fabricated on a silicon Si wafer using standard microfabrication techniques and released using a xenon difluoride XeF2 dry-etch technique and may therefore be applicable to microelectromechanical system MEMS switch or actuator applications. We demonstrated partially released devices capable of tearing a 1 3 m rib of Si upon thermal actuation.

Subject Categories:

  • Physical Chemistry
  • Properties of Metals and Alloys
  • Fabrication Metallurgy

Distribution Statement:

APPROVED FOR PUBLIC RELEASE