Accession Number:

ADA621774

Title:

Novel Applications of a Thermally Tunable Bistable Buckling Silicon-on-Insulator (SOI) Microfabricated Membrane

Descriptive Note:

Doctoral thesis

Corporate Author:

AIR FORCE INSTITUTE OF TECHNOLOGY WRIGHT-PATTERSON AFB OH GRADUATE SCHOOL OF ENGINEERING AND MANAGEMENT

Personal Author(s):

• Lake, Robert A.

Report Date:

2015-09-17

Pagination or Media Count:

175.0

Abstract:

Buckled membranes are commonly used microelectromechanical systems MEMS structures. Recent work has demonstrated that the deflection and stiffness of these membranes can be tuned through localized joule heating. These devices were implemented into the design and fabrication of two novel device applications, a tunable pressure sensor and a steerable micromirror. A differential pressure across the membrane causes de reflection, up or down, which can be measured and related to a specific pressure. By tuning the stiffness of the membrane, its pressure response is varied providing a wider range of application for the pressure sensor. A 2.0mm by 2.0mm square membrane demonstrated a 60 percent decrease in pressure sensitivity from 1.433mpsi to 0.55mpsi. A steerable micromirror was realized by selectively heating a single quadrant of a buckled membrane, localized heating results in membrane de deflection constrained to that quadrant.

Descriptors:

• *MEMBRANES
• *MICROELECTROMECHANICAL SYSTEMS
• *SILICON ON INSULATOR
• ACTUATORS
• BISTABLE DEVICES
• BUCKLING
• CAVITIES
• CHEMICAL VAPOR DEPOSITION
• COMPUTERIZED SIMULATION
• DEFLECTION
• FABRICATION
• HEATING
• INTEGRATED CIRCUITS
• LOW PRESSURE
• POLYSILICONS
• PRESSURE GRADIENTS
• REACTIVE ION ETCHING
• SCANNING ELECTRON MICROSCOPES
• SENSITIVITY
• STIFFNESS
• STRUCTURAL RESPONSE
• SULFUR HEXAFLUORIDE
• THERMAL EXPANSION
• THESES
• TUNING

Subject Categories:

• Physical Chemistry
• Electrical and Electronic Equipment
• Solid State Physics
• Thermodynamics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE