Accession Number:

ADA621260

Title:

Development and Verification of Sputtered Thin-Film Nickel-Titanium (NiTi) Shape Memory Alloy (SMA)

Descriptive Note:

Final rept. Sep 2014-May 2015

Corporate Author:

ARMY RESEARCH LAB ADELPHI MD SENSORS AND ELECTRON DEVICES DIRECTORATE

Personal Author(s):

• Knick, Cory R.
• Morris, Christopher J.

Report Date:

2015-08-01

Pagination or Media Count:

16.0

Abstract:

This report details the development of a co-sputtering process to yield a shape memory alloy SMA film with a controllable composition of nickel-titanium Ni50Ti50 and transformation temperature around 60 C. Shape memory effects were characterized using differential scanning calorimetry DSC, for which we demonstrated martensite-austenite phase change at 57 C for 1 3 m films annealed at 600 C for 1 h. We used wafer stress versus temperature measurements as additional confirmation for the repeatable measurement of reversible phase transformation peaking at 73 C upon heating. Up to 62 MPa was available for actuation during the thermally induced phase change. Future work will involve fabricating functional microelectromechanical system MEMS devices i.e., cantilevers, actuators, etc. based on our Ni50Ti50 SMA.

Descriptors:

• *PHASE TRANSFORMATIONS
• *SHAPE MEMORY ALLOYS
• *THIN FILMS
• ACTUATION
• DIFFERENTIAL SCANNING CALORIMETRY
• MICROELECTROMECHANICAL SYSTEMS
• NICKEL
• SPUTTERING
• STRESSES
• TEMPERATURE
• TITANIUM
• VERIFICATION

Subject Categories:

• Physical Chemistry
• Electrical and Electronic Equipment
• Metallurgy and Metallography
• Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE