Accession Number:

ADA621114

Title:

Phase and Texture Evolution in Chemically Derived PZT Thin Films on Pt Substrates

Descriptive Note:

Journal article

Corporate Author:

FLORIDA UNIV GAINESVILLE DEPT OF MATERIALS SCIENCE AND ENGINEERING

Report Date:

2014-09-01

Pagination or Media Count:

10.0

Abstract:

The crystallization of lead zirconate titanate PZT thin films was evaluated on two different platinum coated Si substrates. One substrate consisted of a Pt coating on a Ti adhesion layer while the other consisted of a Pt coating on a TiO2 adhesion layer. The Pt deposited on TiO2 exhibited a higher degree of preferred orientation than the Pt deposited on Ti as measured by the FWHM of the 111 peak about the sample normal. PZT thin films with a nominal ZrTi ratio of 5248 were deposited on the substrates using the inverted mixing order IMO route. Phase and texture evolution of the thin films were monitored during crystallization using in situ X-ray diffraction at a synchrotron source. The intensity of the Pt3Pb phase indicated that deposition on a highly oriented PtTiO2 substrate resulted in less diffusion of Pb into the substrate relative to films deposited on PtTi. There was also no evidence of the pyrochlore phase influencing texture evolution. The results suggest that PZT nucleates directly on Pt, which explains the observation of a more highly oriented 111 texture of PZT on the PtTiO2 substrate than on the PtTi substrate.

Subject Categories:

  • Physical Chemistry
  • Coatings, Colorants and Finishes
  • Crystallography
  • Electricity and Magnetism
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE