Accession Number:

ADA617273

Title:

Oxide Based Transistor for Flexible Displays

Descriptive Note:

Final rept. 2 Aug 2010-1 Aug 2013

Corporate Author:

NORTH CAROLINA AGRICULTURAL AND TECHNICAL STATE UNIV GREENSBORO

Personal Author(s):

Report Date:

2014-09-15

Pagination or Media Count:

101.0

Abstract:

The team of NC AT and RTI, International investigated In free GaSnZnO GSZO material system, as the active channel in thin film transistors TFTs for next generation display technologies. A detailed and comprehensive study was carried out to ascertain the processproperty relationships of radio frequency RF sputtered GSZO films as a function of number of deposition parameters, including deposition temperature, process pressure and annealing temperature, duration and ambient using variety of characterization techniques for chemical and microstructural properties, electrical and opto-electrical properties. The impact of process conditions on the device performance was also subject of detailed study.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE