Dynamic Actuation of Single-Crystal Diamond Nanobeams
HARVARD UNIV CAMBRIDGE MA SCHOOL OF ENGINEERING AND APPLIED SCIENCES
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We show the dielectrophoretic actuation of single-crystal diamond nanomechanical devices using gradient radio-frequency electromagnetic forces. Both cantilever and doubly clamped beams, fabricated using our angled-etching fabrication technique,1 are demonstrated, with operation frequencies ranging from a few MHz to 50 MHz. Frequency tuning and parametric actuation are also studied.
- Physical Chemistry
- Electrical and Electronic Equipment