Time Domain Switched Accelerometer Design and Fabrication
SPACE AND NAVAL WARFARE SYSTEMS CENTER SAN DIEGO CA
Pagination or Media Count:
The objective of this report is to record the decision-making process for developing the device design and fabrication workflow for the time-domain switched accelerometers TDSA developed as part of the Naval Innovative Science and Engineering NISE-funded project Time Domain Switching Proof Mass Proximity Switch Utilization for Inertial Navigation. The design and fabrication of these devices was based on using a sacrificial layer that both defines a capacitive gap for a sliding, non-contact proximity switch and frees a wafer-thick proof-mass to vibrate in the plane of the wafer. Time-domain switched accelerometers can be built using a three-mask process. The vacuum-sealing process described in this report is conducted at a low temperature and can be used to vacuum pack the devices on wafer.
- Test Facilities, Equipment and Methods