Accession Number:

ADA605808

Title:

A String Model Etching Algorithm

Descriptive Note:

Memorandum rept.

Corporate Author:

CALIFORNIA UNIV BERKELEY ELECTRONICS RESEARCH LAB

Personal Author(s):

Report Date:

1979-10-18

Pagination or Media Count:

29.0

Abstract:

The basic algorithm and software implementation of a string model for simulation of surface etching are presented. The algorithm models the time evolution of a line edge profile by advancing nodes or points on a piecewise linear curve representing the profile. The specific formulas for the direction and rate of advance, insertion and deletion of points and deletion of loops are shown. Complete software documentation in the form of parameter definitions and a listing of the FORTRAN code for a CDC 6400 machine are included.

Subject Categories:

  • Computer Programming and Software
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE