Accession Number:

ADA598495

Title:

Microelectromechanical Systems (MEMS) Photoacoustic (PA) Detector of Terahertz (THz) Radiation for Chemical Sensing

Descriptive Note:

Master's thesis

Corporate Author:

AIR FORCE INSTITUTE OF TECHNOLOGY WRIGHT-PATTERSON AFB OH GRADUATE SCHOOL OF ENGINEERING AND MANAGEMENT

Personal Author(s):

Report Date:

2014-03-01

Pagination or Media Count:

117.0

Abstract:

In this research effort, a Microelectromechanical system MEMS cantilever pressure sensor was designed, modeled, and fabricated to investigate the photoacoustic PA response of gases to terahertz THz radiation under low vacuum conditions. Previous efforts in this project were improved upon, to include lowering resting out-of-plane curvature to improve sensitivity of devices. Dimensional analysis is taken into consideration and altered dimensions also serve to boost sensitivity while improving fragility of devices. All devices were fabricated on silicon-on-insulator SOI wafers and tested in a custom designed THz vacuum chamber. Fabricated devices have a minimum normalized noise equivalent absorption NNEA coefficient of 4.28x10-10, an improvement of 69 on prior 10micro devices.

Subject Categories:

  • Electrical and Electronic Equipment
  • Miscellaneous Detection and Detectors

Distribution Statement:

APPROVED FOR PUBLIC RELEASE