Transparent Conducting Oxides for Infrared Plasmonic Waveguides: ZnO (Preprint)
AIR FORCE RESEARCH LAB WRIGHT-PATTERSON AFB OH SENSORS DIR AEROSPACE COMPONENTS AND SUBSYSTEMS TECHNOLOGY DIV/ELECTRO-OPTICS COMPONENTS BR
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Plasmonics combines attractive features of nanoelectronics and optics enabling highly integrated, subwavelength optical and electronic circuits. This review introduces different materials available for plasmonic waveguiding applications with an emphasis on highly conducting ZnO. In addition, the paper contains analysis of a set of thin Al-doped ZnO AZO layers grown by RF sputtering on quartz glass that employ a unique, 20-nm-thick, ZnON buffer layer, which minimizes the strong thickness dependence of mobility micro on thickness d.
- Inorganic Chemistry
- Electrical and Electronic Equipment
- Plasma Physics and Magnetohydrodynamics