High Rate Deposition of Thick CrN and Cr2N Coatings Using Modulated Pulse Power (MPP) Magnetron Sputtering
ARMY ARMAMENT RESEARCH DEVELOPMENT AND ENGINEERING CENTER WATERVLIET NY BENET LABS
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As a variation of high power pulsed magnetron sputtering technique, modulated pulse power MPP magnetron sputtering can achieve a high deposition rate while at the same time achieving a high degree of ionization of the sputtered material with low ion energies. These advantages of the MPP technique can be utilized to obtain dense coatings with a small incorporation of the residual stress and defect density for the thick coating growth. In this study, the MPP technique has been utilized to reactively deposit thick Cr2N and CrN coatings up to 55 m on AISI 440C steel and cemented carbide substrates in a closed field unbalanced magnetron sputtering system.
- Inorganic Chemistry
- Coatings, Colorants and Finishes
- Properties of Metals and Alloys
- Fabrication Metallurgy