Accession Number:

ADA582180

Title:

Fabrication and Properties of Organic-Inorganic Nanolaminates Using Molecular and Atomic Layer Deposition Techniques

Descriptive Note:

Final technical rept. 1 Feb 2009-30 Nov 2011

Corporate Author:

COLORADO UNIV AT BOULDER DEPT OF CHEMISTRY AND BIOCHEMISTRY

Personal Author(s):

• George, Steven M.

Report Date:

2012-02-01

Pagination or Media Count:

22.0

Abstract:

Over the last three years, our AFOSR grant focused on issues related to gas diffusion barriers on flexible polymers. We focused on the fabrication of nanolaminates and alloys using atomic layer deposition ALD and molecular layer deposition MLD techniques. The goal was to produce gas diffusion barriers on polymers that were flexible and could function as ultrabarriers to prevent H2O permeation. We focused on three key issues the critical strains for cracking of Al2O3 ALD films the improvement of flexibility by fabricating ALDMLD alloys and the use of MLD films as compliant interlayers.

Descriptors:

• *THIN FILMS
• ALLOYS
• ATOMIC PROPERTIES
• FABRICATION
• MOLECULES
• STRAIN(MECHANICS)

Subject Categories:

• Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE