Accession Number:

ADA581801

Title:

Mechanical and Ferroelectric Response of Highly Textured PZT Films for Low Power MEMS

Descriptive Note:

Annual rept. 15 Jun-31 Jul 2012

Corporate Author:

ILLINOIS UNIV AT URBANA DEPT OF AEROSPACE ENGINEERING

Personal Author(s):

• Chasiotis, Ioannis

Report Date:

2012-10-01

Pagination or Media Count:

6.0

Abstract:

In the reporting 1.5 month period we established the basic experimental tools required to carry out experiments with thin Pt films that serve as top and bottom electrodes in PZT MEMS. The graduate student was trained on materials characterization tools and the microscale thin film testing apparatus at the PIs laboratory. Furthermore, thin Pt films were fabricated at ARL US Army Research Laboratory ARL in Adelphi, MD, which are an integral part of the PZT composite films that will be studied in this project.

Descriptors:

• *FERROELECTRICITY
• *LEAD ZIRCONATE TITANATES
• *MECHANICS
• *THIN FILMS
• ELECTRODES
• MICROELECTROMECHANICAL SYSTEMS
• PLATINUM
• THICKNESS

Subject Categories:

• Inorganic Chemistry
• Electrical and Electronic Equipment
• Electricity and Magnetism
• Mechanics
• Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE