Accession Number:

ADA574649

Title:

Fabrication Development for Nanowire GHz-Counting-Rate Single-Photon Detectors

Descriptive Note:

Journal article

Corporate Author:

MASSACHUSETTS INST OF TECH CAMBRIDGE

Personal Author(s):

• Yang, Joel K.
• Dauler, Eric
• Ferri, Antonin
• Pearlman, Aaron
• Verevkin, Aleksandr
• Gol'tsman, Gregory
• Voronov, Boris
• Sobolewski, Roman
• Keicher, William E.
• Berggren, Karl K.

Report Date:

2005-06-01

Pagination or Media Count:

7.0

Abstract:

We have developed a fabrication process for GHz-counting-rate, single-photon, high-detection-efficiency NbN, nanowire detectors. We have demonstrated two processes for the device patterning, one based on the standard polymethylmethacrylate PMMA organic positive-tone electron-beam resist and the other based on the newer hydrogen silsesquioxane HSQ negative-tone spin-on-glass resist. The HSQ-based process is simple and robust, providing high resolution and the prospect of high fill-factors. Initial testing results show superconductivity in the films, and suggest that the devices exhibit photosensitivity.

Descriptors:

• *DETECTORS
• ELECTRON BEAMS
• FABRICATION
• HIGH RESOLUTION
• NANOWIRES
• PHOTONS
• REPRINTS
• SUPERCONDUCTIVITY

Subject Categories:

• Miscellaneous Detection and Detectors

Distribution Statement:

APPROVED FOR PUBLIC RELEASE