Fabrication Development for Nanowire GHz-Counting-Rate Single-Photon Detectors
MASSACHUSETTS INST OF TECH CAMBRIDGE
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We have developed a fabrication process for GHz-counting-rate, single-photon, high-detection-efficiency NbN, nanowire detectors. We have demonstrated two processes for the device patterning, one based on the standard polymethylmethacrylate PMMA organic positive-tone electron-beam resist and the other based on the newer hydrogen silsesquioxane HSQ negative-tone spin-on-glass resist. The HSQ-based process is simple and robust, providing high resolution and the prospect of high fill-factors. Initial testing results show superconductivity in the films, and suggest that the devices exhibit photosensitivity.
- Miscellaneous Detection and Detectors