Monolithic Micromachined Quartz Resonator based Infrared Focal Plane Arrays
Final rept. 1 Jun 2007-31 Jul 2012
PENNSYLVANIA STATE UNIV STATE COLLEGE OFFICE OF SPONSORED PROGRAMS
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This report summarizes the design, fabrication, and characterization of thermal infrared IR imaging arrays operating at room temperature which are based on Y -cut-quartz bulk acoustic wave resonators. A novel method of tracking the resonance frequency based upon the measurement of impedance is presented. High-frequency 240-MHz micromachined resonators from Y -cut-quartz crystal cuts were fabricated using heterogeneous integration techniques on a silicon wafer. A temperature sensitivity of 22.16 kHzdeg. C was experimentally measured.IR measurements on the resonator pixel resulted in a noise equivalent power of 3.90 nWHz12, a detectivity D of 1 105 sq cm Hz12W, and a noise equivalent temperature difference of 4 mK in the 8 -14 m wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability in video-rate uncooled IR imaging. This work represents the first comprehensive thermal characterization of micromachined Y -cut-quartz resonators and their IR sensing response. In addition the report also summarizes the work done on viscoelastic measurements performed using micromachined quartz resonators and quartz etching work undertaken as part of this work.
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