A Widely-Accessible Distributed MEMS Processing Environment. The MEMS Exchange Program
Final technical rept. 30 Jun 2003-31 Jul 2012
CORPORATION FOR NATIONAL RESEARCH INITIATIVES RESTON VA
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Corporation for National Research Initiatives CNRI is submitting this Final Report for work performed on an award from the Defense Advanced Research Projects Agency DARPA under Grant Number MDA972-03-1-0022. This Grant award supported the program entitled, A Widely-Accessible Distributed MEMS Processing Environment, also known as the MEMS Exchange program, whereby CNRI established, operated, and advanced a distributed MEMS processing environment in which fabrication and testing of MEMS devices and systems is performed at multiple, geographically dispersed sites located around the country.
- Electrical and Electronic Equipment