Accession Number:

ADA569247

Title:

A Widely-Accessible Distributed MEMS Processing Environment. The MEMS Exchange Program

Descriptive Note:

Final technical rept. 30 Jun 2003-31 Jul 2012

Corporate Author:

CORPORATION FOR NATIONAL RESEARCH INITIATIVES RESTON VA

Personal Author(s):

Report Date:

2012-10-29

Pagination or Media Count:

59.0

Abstract:

Corporation for National Research Initiatives CNRI is submitting this Final Report for work performed on an award from the Defense Advanced Research Projects Agency DARPA under Grant Number MDA972-03-1-0022. This Grant award supported the program entitled, A Widely-Accessible Distributed MEMS Processing Environment, also known as the MEMS Exchange program, whereby CNRI established, operated, and advanced a distributed MEMS processing environment in which fabrication and testing of MEMS devices and systems is performed at multiple, geographically dispersed sites located around the country.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE