Fabrication and Electromechanical Performance of a Novel High Modulus Ionogen Micro-Actuator
PENNSYLVANIA STATE UNIV STATE COLLEGE DEPT OF ELECTRICAL ENGINEERING
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In this work, a novel, high modulus sulfonated polymer is utilized as an ionomer for ionic liquid containing micro-ionic actuators ionogel is presented. The ionic polymer is composed of one-to-one ratio 4,6-bis4-hydroxyphenyl-N,N-diphenyl 1,3,5-triazin-2-amine and 4,4-biphenol with bis4-fluorophenyl sulfone DPA-PSBP. The ionogel maintains a relatively higher modulus 700 MPa for 120 wt of ionic liquid compared to other widely used ionomers. High modulus of ionogel enables to realize thin films through solution casting. As an initial demonstration of a micro-ionic actuator, an ionic micro cantilever 200 microns x 33 microns x 5 microns has been micromachined by using focused ion beam FIB milling on the substrate. The micro cantilever performance under DC actuation is tested using optical profilometer and a maximum tip displacement is 42 microns at 1.6V was obtained.
- Physical Chemistry
- Polymer Chemistry
- Electrical and Electronic Equipment