Thick Homoepitaxial GaN with Low Carrier Concentration for High Blocking Voltage
NAVAL RESEARCH LAB WASHINGTON DC
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High voltage GaN Schottky diodes require a thick blocking layer with an exceptionally low carrier concentration. To this aim, a metal organic chemical vapor deposition process was developed to create a 14 micron thick stress-free homoepitaxial GaN film. Low temperature photoluminescence measurements are consistent with low donor background and low concentration of deep compensating centers. Capacitance-voltage measurements performed at 30 deg C verified a low level of about 2 x 10exp 15cu cm of n-type free carriers unintentional doping, which enabled a breakdown voltage of about 500 V. A secondary ion mass spectrometry depth profile confirms the low concentration of background impurities and X-ray diffraction extracted a low dislocation density in the film. These results indicate that thick GaN films can be deposited with free carrier concentrations sufficiently low to enable high voltage rectifiers for power switching applications.
- Solid State Physics