Enhanced Interferometry with Programmable Spatial Light Modulator
Conference briefing charts
METROLASER IRVINE CA
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Modern optical components such as aspheres are difficult to inspect. Interferometry, the usual solution, lacks the required dynamic range. Too many fringes are produced. Adapting interferometry for null measurements currently necessitates special optical components for each inspected component. In this effort, a programmable Spatial Light Modulator SLM was incorporated into an optical inspection instrument to boost the dynamic range and enable null testing on almost any component using off the shelf optics. The instrument was used to measure the surface accuracy of a 6 inch tall cone with a top diameter of 8.4 inches and a bottom diameter of 8.2 inches. Measurement simulations were compared with test data and the system errors were investigated. A procedure was also developed and tested to subtract system aberrations. A dynamic range of 150 wavelengths was demonstrated.
- Electrical and Electronic Equipment
- Ceramics, Refractories and Glass