Accession Number:

ADA536312

Title:

Enhanced Interferometry with Programmable Spatial Light Modulator

Descriptive Note:

Conference briefing charts

Corporate Author:

METROLASER IRVINE CA

Personal Author(s):

Report Date:

2010-06-07

Pagination or Media Count:

44.0

Abstract:

Modern optical components such as aspheres are difficult to inspect. Interferometry, the usual solution, lacks the required dynamic range. Too many fringes are produced. Adapting interferometry for null measurements currently necessitates special optical components for each inspected component. In this effort, a programmable Spatial Light Modulator SLM was incorporated into an optical inspection instrument to boost the dynamic range and enable null testing on almost any component using off the shelf optics. The instrument was used to measure the surface accuracy of a 6 inch tall cone with a top diameter of 8.4 inches and a bottom diameter of 8.2 inches. Measurement simulations were compared with test data and the system errors were investigated. A procedure was also developed and tested to subtract system aberrations. A dynamic range of 150 wavelengths was demonstrated.

Subject Categories:

  • Electrical and Electronic Equipment
  • Ceramics, Refractories and Glass
  • Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE