Accession Number:

ADA523557

Title:

Encapsulated Ball Bearings for Rotary Micro Machines

Descriptive Note:

Journal article

Corporate Author:

MARYLAND UNIV COLLEGE PARK DEPT OF ELECTRICAL AND COMPUTER ENGINEERING

Personal Author(s):

Report Date:

2007-01-01

Pagination or Media Count:

7.0

Abstract:

We report on the first encapsulated rotary ball bearing mechanism using silicon microfabrication and stainless steel balls. The method of capturing stainless steel balls within a silicon race to support a silicon rotor both axially and radially is developed for rotary micro machines and MEMS ball bearing tribology studies. Initial demonstrations show speeds up to 6.8 krpm without lubrication, while speeds up to 15.6 krpm with lubrication are possible. Qualitative analysis is used to explain start-up behavior and investigate the wear of the stainless steel ball and silicon race.

Subject Categories:

  • Electrical and Electronic Equipment
  • Fabrication Metallurgy
  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Machinery and Tools

Distribution Statement:

APPROVED FOR PUBLIC RELEASE