Black Silicon Germanium (SiGe) for Extended Wavelength Near Infrared Electro-optical Applications
ARMY RESEARCH LAB ADELPHI MD
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We have investigated for the first time the reflectivity and absorbance of black silicon-germanium Si1-xGex. Black Si1-xGex was produced by metal enhanced chemical etching using nanometer-scale gold particles as catalyst and HFH2O2CH3COOH etchant. The etched surface was black, textured, and showed strong suppression of reflectivity and enhancement of absorption in the near-infrared region. These properties are consistent with Si1-xGex becoming highly micro-structured due to metal catalysis and wet etching. The lowering of reflection and enhancement of absorption in Si1-xGex is an important milestone towards practical, extended wavelength 2 micrometers electro-optical applications.
- Inorganic Chemistry