Accession Number:

ADA513759

Title:

Power MEMS Development

Descriptive Note:

Monthly rept. 1 Jan-31 2010

Corporate Author:

SRI INTERNATIONAL MENLO PARK CA PHYSICAL SCIENCES DIV

Personal Author(s):

Report Date:

2010-01-01

Pagination or Media Count:

9.0

Abstract:

The resettable circuit breaker cantilevers use silicon dioxide SiO2 for temperature compensation. The compressive stress in the SiO2 causes the cantilever to bow upwards 400 um after release. In the DC-DC voltage converter the gap between the electrodes is 1.4 um. After release, the cantilevers are stuck down. We devised a short loop experiment to better understand the cantilever behavior by omitting the contact metal and SiO2 layers from test cantilevers.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE