Accession Number:

ADA512915

Title:

DC-GHz Micromachined Capacitive Air Transducers

Descriptive Note:

Conference paper

Corporate Author:

STANFORD UNIV CA EDWARD L GINZTON LAB OF PHYSICS

Report Date:

1999-08-24

Pagination or Media Count:

19.0

Abstract:

Surface micromachining can achieve low frequency 20-200 kHz receivers. A broadband detection scheme allows operation over dc-GHz range. 1-D and 2-D arrays enable direction sensing. Through-wafer vias enable integration to electronics via flip-chip bonding.

Subject Categories:

  • Electrical and Electronic Equipment
  • Miscellaneous Detection and Detectors
  • Acoustics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE