DC-GHz Micromachined Capacitive Air Transducers
STANFORD UNIV CA EDWARD L GINZTON LAB OF PHYSICS
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Surface micromachining can achieve low frequency 20-200 kHz receivers. A broadband detection scheme allows operation over dc-GHz range. 1-D and 2-D arrays enable direction sensing. Through-wafer vias enable integration to electronics via flip-chip bonding.
- Electrical and Electronic Equipment
- Miscellaneous Detection and Detectors