All Surface Micromachined Microphone
LUCENT TECHNOLOGIES INC MURRAY HILL NJ
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All Surface Micromachined Microphones. Advantages 1. Freedom of Design, more functionality 2. Very Suitable for Integration with electronics 3. Well-established Commercial Process 4. Foundries. Disadvantages 1. Small Gaps, damping - solved by Out of Plane Structures 2. Some Assembly Required - solved by Self Assembling.
- Electrical and Electronic Equipment
- Miscellaneous Detection and Detectors