Accession Number:

ADA512914

Title:

All Surface Micromachined Microphone

Descriptive Note:

Conference paper

Corporate Author:

LUCENT TECHNOLOGIES INC MURRAY HILL NJ

Personal Author(s):

Report Date:

1999-08-24

Pagination or Media Count:

15.0

Abstract:

All Surface Micromachined Microphones. Advantages 1. Freedom of Design, more functionality 2. Very Suitable for Integration with electronics 3. Well-established Commercial Process 4. Foundries. Disadvantages 1. Small Gaps, damping - solved by Out of Plane Structures 2. Some Assembly Required - solved by Self Assembling.

Subject Categories:

  • Electrical and Electronic Equipment
  • Miscellaneous Detection and Detectors
  • Acoustics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE