Accession Number:

ADA512912

Title:

A High Performance MEMS Thin-Film Teflon Electret Microphone

Descriptive Note:

Conference paper

Corporate Author:

CALIFORNIA INST OF TECH PASADENA DEPT OF ELECTRICAL ENGINEERING

Personal Author(s):

Report Date:

1999-08-24

Pagination or Media Count:

13.0

Abstract:

Micromachined Electret Condensor Microphone 1. Requires no external power source self-biasing 2. Can be mm-scale with high sensitivity 10 mVPa 3. Integrable with on-chip electronics 4. Mass producible like ICs...low cost, high yield 5. Structurally simple...increased reliability.

Subject Categories:

  • Electrical and Electronic Equipment
  • Miscellaneous Detection and Detectors
  • Acoustics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE