A High Performance MEMS Thin-Film Teflon Electret Microphone
CALIFORNIA INST OF TECH PASADENA DEPT OF ELECTRICAL ENGINEERING
Pagination or Media Count:
Micromachined Electret Condensor Microphone 1. Requires no external power source self-biasing 2. Can be mm-scale with high sensitivity 10 mVPa 3. Integrable with on-chip electronics 4. Mass producible like ICs...low cost, high yield 5. Structurally simple...increased reliability.
- Electrical and Electronic Equipment
- Miscellaneous Detection and Detectors