Accession Number:

ADA505912

Title:

Piezomems Devices for Advanced Communications and Phased Array Radar

Descriptive Note:

Conference paper

Corporate Author:

ARMY RESEARCH LAB ADELPHI MD SENSORS AND ELECTRON DEVICES DIRECTORATE

Personal Author(s):

• Polcawich, Ronald G.
• Judy, Daniel
• Pulskamp, Jeffrey S.

Report Date:

2008-12-01

Pagination or Media Count:

5.0

Abstract:

In this article, we report on the successful demonstration of lead zirconate titanate PZT thin film based MEMS devices for use in radio frequency RF systems. Individual series switches and single pole multi-throw switching elements operating at or below 10 V have been developed capable of operating over a wide temperature range. The switch technology also provides an enabling technology for low voltage, mechanical logic. Along with switches and phase shifters, PZT based MEMS resonators show promise in the sub-GHz regime with demonstrated insertion loss values near 3.5 dB.

Descriptors:

• *MICROELECTROMECHANICAL SYSTEMS
• *RADIOFREQUENCY
• *LEAD ZIRCONATE TITANATES
• *COMMUNICATION AND RADIO SYSTEMS
• RESONATORS
• PHASED ARRAYS
• SWITCHES
• PHASE SHIFT CIRCUITS
• RADAR
• THIN FILMS
• MECHANICAL PROPERTIES
• TEMPERATURE
• RANGE(EXTREMES)

Subject Categories:

• Inorganic Chemistry
• Electrical and Electronic Equipment
• Radio Communications

Distribution Statement:

APPROVED FOR PUBLIC RELEASE