Accession Number:

ADA502102

Title:

Novel MEMS Apparatus for In Situ Thermo-Mechanical Tensile Testing of Materials at the Micro- and Nano-Scale (Preprint)

Descriptive Note:

Conference paper preprint

Corporate Author:

AIR FORCE RESEARCH LAB WRIGHT-PATTERSON AFB OH MATERIALS AND MANUFACTURING DIRECTORATE

Personal Author(s):

Report Date:

2009-04-01

Pagination or Media Count:

6.0

Abstract:

We present, for the first time, a MEMS-based test methodology that potentially enables elevated-temperature mechanical tensile testing of nano- and micro-scale samples within a SEM or TEM T 500 degrees C. Importantly, the test methodology allows for the samples to be fabricated separately from the MEMS-apparatus, a significant advancement from other test devices developed by some of the present authors. Therefore the test methodology should be applicable to the study of a wide range of materials. Other advancements found in the methodology include a co-fabricated force calibration device, and a built-in thermocouple sensor to measure the stage temperature close to the sample.

Subject Categories:

  • Metallurgy and Metallography
  • Test Facilities, Equipment and Methods
  • Electricity and Magnetism
  • Mechanics
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE