Accession Number:

ADA495957

Title:

Q5 Known Good Substrates Technical Report

Descriptive Note:

Final rept. 1 Dec 2008-28 Feb 2009

Corporate Author:

DOW CORNING CORP MIDLAND MI

Personal Author(s):

• Loboda, Mark J.
• Carlson, Eric P.
• Chung, Gilyong
• Lauer, Rebecca S.

Report Date:

2009-03-31

Pagination or Media Count:

12.0

Abstract:

The Known Good Substrates KGS Phase II program was initiated 29 August 2007. Subcontractor work on CVD modeling and analysis of epitaxy experiments have been the main focus of efforts in Q6. This technical report summarizes the progress by all team members against the tasks and milestones. This is the final technical quarterly summary for the KGS Phase II program. It is part of the contract extension where consideration was given by NRL to allow additional subcontractor work on CVD modeling and time for analysis of epitaxy experiments designed to improve the epitaxy doping uniformity.

Descriptors:

• *EPITAXIAL GROWTH
• *SILICON CARBIDES
• *WAFERS
• METROLOGY
• POLISHING
• SUBSTRATES
• CHEMICAL VAPOR DEPOSITION
• DOPING

Subject Categories:

• Electrical and Electronic Equipment
• Crystallography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE