Characteristics of Surface-Normal Fano Filters on Flexible Plastic Substrates
TEXAS UNIV AT ARLINGTON NANOFAB CENTER
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We report here the angular and polarization dependent transmission characteristics of surface-normal optical filters based on Fano resonances on patterned single crystalline silicon nanomembranes SiNM, which were fabricated and transferred onto transparent PET plastic substrates using a disruptive SiNM wet transfer process. The measured surface-normal and angle-dependent filter transmission results agree well with the design and simulation based on 3D finite-difference time-domain technique.
- Electrical and Electronic Equipment