Accession Number:

ADA495631

Title:

Frequency Response of Nanoelectromechanical Cantilevers Operating in Fluid

Descriptive Note:

Conference paper

Corporate Author:

NAVAL RESEARCH LAB WASHINGTON DC

Report Date:

2008-08-01

Pagination or Media Count:

5.0

Abstract:

Nano-electro-mechanical resonators used for sensing, data storage, and nano-fabrication applications are often operated as feed-back control systems. To determine the transfer function of silicon cantilevers with a width of 5.0 micrometer, a thickness of 800 nm, and lengths of 10, 15, 30, and 45 micrometer, the damping in air and liquid was simulated numerically using an integrated fluidstructure solver. Bode diagrams and Nyquist plots of the cantilever transfer function indicate that the resonator will behave as a heavily damped system in liquid, and a lightly damped system in air. After experimental validation, ths computational method is expected to allow prediction of frequency response prior to fabrication of NEMS resonators.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE