Accession Number:

ADA472302

Title:

Hybrid Micro-Electro-Mechanical Tunable Filter

Descriptive Note:

Doctoral thesis

Corporate Author:

AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH SCHOOL OF ENGINEERING

Personal Author(s):

Report Date:

2007-09-01

Pagination or Media Count:

202.0

Abstract:

While advantages such as good thermal stability and processing-chemical compatibilities exist for common monolithic-integrated micro-electro-mechanically tunable filters MEM-TF and MEM-tunable vertical cavity surface emitting lasers MT-VCSEL, they often require full processing to determine device characteristics. Alternatively, the MEM actuators and the optical parts may be fabricated separately, then subsequently bonded. This hybrid approach potentially increases design flexibility. Since hybrid techniques allow integration of heterogeneous material systems, best of breed compound optoelectronic devices may be customized to enable materials groups to be optimized for tasks they are best suited. Thus, as a first step toward a hybrid AlGaAs-polySi MT-VCSEL, this dissertation reports the design, fabrication, and demonstration of an electrostatically actuated hybrid MEM-TF. A 250x250-um2, 4.92-um-thick, AlGaAs-GaAs distributed Bragg reflector was successfully flip-bonded to a polySi piston electrostatic actuator using SU-8 photoresist as bonding adhesive. The device demonstrated 53nm 936.5 - 989.5nm of resonant wavelength tuning over the actuation voltage range of 0 to 10 V.

Subject Categories:

  • Electrical and Electronic Equipment
  • Electrooptical and Optoelectronic Devices
  • Radiofrequency Wave Propagation

Distribution Statement:

APPROVED FOR PUBLIC RELEASE