MEMS Shear Stress Sensors: Promise and Progress
FLORIDA UNIV GAINESVILLE MECHANICAL AND AEROSPACE ENGINEERING
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This paper reviews existing microelectromechanical systems MEMS-based shear stress sensors. The promise and progress of MEMS scaling advantages to improve the spatial and temporal resolution and accuracy of shear stress measurement is critically reviewed. The advantages and limitations of existing devices are discussed. Finally, unresolved technical issues are summarized for future sensor development.
- Electrical and Electronic Equipment
- Miscellaneous Detection and Detectors