Accession Number:

ADA465693

Title:

Microsystems for the Fabrication of Nano-Scale Structures

Descriptive Note:

Conference paper

Corporate Author:

GEORGIA INST OF TECH ATLANTA SCHOOL OF ELECTRICAL AND COMPUTER ENGINEERING

Report Date:

2003-01-01

Pagination or Media Count:

5.0

Abstract:

This paper describes fabrication and testing of microsystems which can be utilized for in-situ deposition control and direct patterning of structures with micron and submicron lateral and vertical dimensions. An electrostatically-driven microactuator acts as an addressable active shutter and shadow mask in a Physical Vapor Deposition system. The displacement of the actuator is controlled in the nano-scale range, without using electrical sensing circuitry, by means of stoppers fabricated as integral parts of the structure. The deposition of metals through the real-time-actuated microsystem allowed control of the three dimensional shape of the deposited patterns as verified by AFM measurements.

Subject Categories:

  • Electrical and Electronic Equipment
  • Electricity and Magnetism
  • Coatings, Colorants and Finishes
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE