Microsystems for the Fabrication of Nano-Scale Structures
GEORGIA INST OF TECH ATLANTA SCHOOL OF ELECTRICAL AND COMPUTER ENGINEERING
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This paper describes fabrication and testing of microsystems which can be utilized for in-situ deposition control and direct patterning of structures with micron and submicron lateral and vertical dimensions. An electrostatically-driven microactuator acts as an addressable active shutter and shadow mask in a Physical Vapor Deposition system. The displacement of the actuator is controlled in the nano-scale range, without using electrical sensing circuitry, by means of stoppers fabricated as integral parts of the structure. The deposition of metals through the real-time-actuated microsystem allowed control of the three dimensional shape of the deposited patterns as verified by AFM measurements.
- Electrical and Electronic Equipment
- Electricity and Magnetism
- Coatings, Colorants and Finishes
- Manufacturing and Industrial Engineering and Control of Production Systems