Accession Number:

ADA465611

Title:

Effect of Electron Detachment on the Wall Potential and Plasma Evolution in the Afterglow Stage

Descriptive Note:

Journal article (postprint)

Corporate Author:

SAINT PETERSBURG STATE UNIV (RUSSIA)

Report Date:

2006-06-01

Pagination or Media Count:

5.0

Abstract:

It is demonstrated that detachment of electrons in the afterglow of an electronegative plasma can lead to a significant increase in negative wall potential with respect to the plasma potential. This effect can be used to modify the near-wall sheath electric field and thickness, which are important for plasma processing applications. Also in the afterglow, this effect can lead to an increase in electron density with time, and a reduction up to total exclusion in diffusion cooling of electrons and can thus be used to modify the electron temperature.

Subject Categories:

  • Plasma Physics and Magnetohydrodynamics
  • Nuclear Physics and Elementary Particle Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE