Accession Number:

ADA465137

Title:

Magnetic Induction Machines Embedded in Fusion-Bonded Silicon

Descriptive Note:

Corporate Author:

GEORGIA INST OF TECH ATLANTA SCHOOL OF ELECTRICAL AND COMPUTER ENGINEERING

Report Date:

2004-06-01

Pagination or Media Count:

5.0

Abstract:

This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials Cu, Ni80Fe20, Co65Fe18Ni17 within etched and fusion-bonded silicon to form the machine structure. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 N m and a projected torque density of 340 N-mm3.

Subject Categories:

  • Machinery and Tools

Distribution Statement:

APPROVED FOR PUBLIC RELEASE