Magnetic Induction Machines Embedded in Fusion-Bonded Silicon
GEORGIA INST OF TECH ATLANTA SCHOOL OF ELECTRICAL AND COMPUTER ENGINEERING
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This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials Cu, Ni80Fe20, Co65Fe18Ni17 within etched and fusion-bonded silicon to form the machine structure. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 N m and a projected torque density of 340 N-mm3.
- Machinery and Tools