Nanoindentation and Contact Stiffness Measurement Using Force Modulation with a Capacitive Load-Displacement Transducer
NAVAL RESEARCH LAB WASHINGTON DC CHEMISTRY DIV
Pagination or Media Count:
We have implemented a force modulation technique for nanoindentation using a three-plate capacitive load-displacement transducer. The stiffness sensitivity of the instrument is 0.1 Nm. We show that the sensitivity of this instrument is sufficient to detect long-range surface forces and to locate the surface of a specimen. The low spring mass 236 mg, spring constant 116 Nm and damping coefficient 0.008 Nsm of the transducer allows measurement of the damping losses for nanoscale contacts. We present the experimental technique, important specimen mounting information, and system calibration for nanomechanical property measurement.