Accession Number:

ADA464931

Title:

A Wafer-Bonded, Floating Element Shear-Stress Sensor Using a Geometric Moire Optical Transduction Technique

Descriptive Note:

Conference paper

Corporate Author:

FLORIDA UNIV GAINESVILLE MECHANICAL AND AEROSPACE ENGINEERING

Report Date:

2007-01-01

Pagination or Media Count:

7.0

Abstract:

This paper presents a geometric Moire optical-based floating-element shear stress sensor for wind tunnel turbulence measurements. The sensor was fabricated using an aligned waferbondthin-back process producing optical gratings on the backside of a floating element and on the top surface of the support wafer. Measured results indicate a static sensitivity of 0.26 micronsPa, a resonant frequency of 1.7 kHz, and a noise floor of 6.2square root Hz.

Subject Categories:

  • Test Facilities, Equipment and Methods
  • Optics
  • Mechanics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE