Accession Number:

ADA464840

Title:

High-Cycle Life Testing of RF MEMS Switches

Descriptive Note:

Conferenc paper

Corporate Author:

MEMTRONICS PLANO TX

Report Date:

2006-12-01

Pagination or Media Count:

7.0

Abstract:

RF MEMS capacitive switches capable of order of-magnitude impedance changes have demonstrated operating lifetimes exceeding 100 billion switching cycles without failure. In situ monitoring of switch characteristics demonstrates no significant degradation in performance and quantifies the charging properties of the switch silicon dioxide film. This demonstration lends credence to the mechanical robustness of RF MEMS switches.

Subject Categories:

  • Electrical and Electronic Equipment
  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Radiofrequency Wave Propagation

Distribution Statement:

APPROVED FOR PUBLIC RELEASE