Thermoreflectance Imaging of Superlattice Micro Refrigerators
CALIFORNIA UNIV SANTA CRUZ SCHOOL OF ENGINEERING
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High resolution thermal images of operating micro refrigerators are presented. Using the thermo reflectance method and a high dynamic range PIN array camera, thermal images with 50mK thermal resolution and high spatial resolution are presented. This general method can be applied to any operating semiconductors, and can be used as a tool for identifying fabrication failures. With further optimization of the experimental setup, we expect to achieve sub-micron spatial resolution thermal images.
- Electrical and Electronic Equipment
- Electrooptical and Optoelectronic Devices
- Test Facilities, Equipment and Methods