The Effects of Ionising Radiation on MEMS Silicon Strain Gauges: Preliminary Background and Methodology
DEFENCE SCIENCE AND TECHNOLOGY ORGANISATION VICTORIA (AUSTRALIA) HUMAN PROTECTION AND PERFORMANCE DIV
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Despite limited reporting in the open literature describing the effects of ionising radiation on MicroElectroMechanical System MEMS devices or components, there are indications that some MEMS technologies exhibit vulnerability to radiation effects. To begin to gain an understanding of the issues surrounding the susceptibility of MEMS technologies, an investigation into the effects of radiation damage on the electronic and the mechanical properties of a specific MEMS silicon strain gauge will be conducted. The methodology followed is outlined in this report.
- Electrical and Electronic Equipment
- Atmospheric Physics
- Atomic and Molecular Physics and Spectroscopy