SiGe/Si Superlattice Coolers
CALIFORNIA UNIV SANTA BARBARA DEPT OF ELECTRICAL AND COMPUTER ENGINEERING
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The fabrication and characterization of SiGeSi superlattice coolers are described. Superlattice structures were used to enhance the device performance by reducing the thermal conductivity between the hot and the cold junctions, and by providing selective removal of hot carriers through thermionic emission. Cooling of 2.2 K and 2.5 K were measured on n-type and p-type 75 75 micronmeter2 devices, corresponding to cooling power densities of hundreds of watts per square centimeter. Cooling up to 7.2 K was obtained at 150 C for p-type 50 50 micronmeter2 devices. The results show that n-type and p-type coolers can work together in similar optimal conditions. This paves the road to fabricate n-type and p-type superlattice coolers in an array format electrically in series and thermally in parallel, similar to conventional thermoelectric devices, and thus achieve large cooling capacities with relatively small currents.
- Electrical and Electronic Equipment