Development of an Uncooled Photomechanic Infrared Sensor Based on the IR Organ of the Pyrophilous Jewel Beetle Melanophila Acuminata
Final rept. 1 Jul 2005-30 Sep 2006
CALIFORNIA UNIV BERKELEY DEPT OF MECHANICAL ENGINEERING
Pagination or Media Count:
Initial efforts focused on the MEMS materials development effort including deposition and patterning process for chitosan, and more recent work resulted in the development of a photolithography process for chitosan compatible with traditional microfabrication processes. In order to realize a bio-inspired imaging system based on melanophila acuminata, the polysaccharide chitosan a water-soluble derivative of chitin which can be reacetylated back to chitin through post-processing was engineered from a commercially available power into a thin film compatible with semiconductor microfabrication processes. Substantial, novel work went into the synthesis, characterization, deposition and patterning of chitosan. MEMS compatible fabrication methods were developed. Controlled deposition of chitosan up to 5 um thick, with uniformity of 10 and roughness of less than 1 has been achieved. Stress temperature curves were recorded from amient to dehydrated conditions showing a clear hysteresis curve which can be exploited for exploited for thermal IR transduction purposes.
- Electrical and Electronic Equipment
- Electricity and Magnetism